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Reaction Tubes

product details

The 12 inch quartz reaction tubes are essential components designed for high-temperature semiconductor and photovoltaic processing systems requiring larger wafer capacities. Manufactured from high-purity fused quartz, these tubes provide outstanding thermal shock resistance, chemical inertness, and mechanical strength.

Their expanded diameter allows for efficient processing of larger wafers or increased batch sizes, while maintaining precise dimensional control and smooth inner surfaces for uniform gas flow and temperature distribution. These tubes excel in diffusion, oxidation, LPCVD, and annealing applications, ensuring consistent process results and high device yields.

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  • No.5177 Qianghua West Road, Dongqian Street, Nanxun District, Huzhou City, Zhejiang Province

  • +86-572-3032373

    +86-572-3033016

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After 32 years of development and accumulation of technology.

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