The silicon carbide boat is a high-strength, high-temperature resistant carrier designed for holding wafers or materials during thermal processing in semiconductor manufacturing, ceramics sintering, and other advanced industrial applications. Made from dense, high-purity silicon carbide, this boat offers exceptional thermal conductivity, outstanding resistance to oxidation, and excellent chemical inertness.
Its robust structure withstands thermal shock and aggressive process atmospheres, ensuring stable support and minimal contamination throughout diffusion, annealing, and chemical vapor deposition (CVD) processes. The silicon carbide boat's precision engineering supports uniform heat distribution and optimized gas flow, enhancing process consistency and yield.
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