The silicon carbide ceramic wafer boat is a high-performance carrier designed to securely hold semiconductor wafers during high-temperature processes such as diffusion, annealing, and chemical vapor deposition. Made from advanced silicon carbide ceramic, this boat combines exceptional thermal conductivity with superior resistance to oxidation, thermal shock, and chemical corrosion.

Its durable ceramic structure maintains precise wafer spacing and dimensional stability, ensuring uniform gas flow and temperature distribution critical for process consistency and high device yields. Resistant to harsh furnace atmospheres and aggressive gases, the silicon carbide ceramic wafer boat extends service life and reduces contamination risks.