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Quartz Bases

product details

The 6 inch quartz susceptor pedestal is designed to support and position wafers or susceptors within high-temperature semiconductor processing chambers. Constructed from high-purity quartz, it ensures chemical inertness and structural stability under extreme thermal conditions common in CVD, epitaxy, and diffusion processes.

This pedestal serves a dual function: providing precise mechanical support while contributing to uniform heat transfer from the susceptor to the wafer. Its dimensional accuracy and thermal compatibility reduce temperature gradients and wafer warping, supporting consistent layer deposition and improved device yield.

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  • No.5177 Qianghua West Road, Dongqian Street, Nanxun District, Huzhou City, Zhejiang Province

  • +86-572-3032373

    +86-572-3033016

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After 32 years of development and accumulation of technology.

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