The 6 inch quartz boat for diffusion of wafer processing is a high-precision carrier designed to support 6-inch silicon wafers during high-temperature diffusion processes in semiconductor fabrication. Made from high-purity fused quartz, this boat provides excellent thermal stability, low thermal expansion, and outstanding resistance to chemical corrosion, ensuring consistent performance in oxidizing and dopant-rich furnace environments.

Engineered for optimal gas flow and heat uniformity, the boat’s structure promotes even diffusion across all wafer surfaces, enhancing dopant penetration and layer consistency. The carefully machined slots maintain accurate wafer spacing and alignment, minimizing warpage and contamination while supporting high-yield, repeatable processing.