The 6 inch quartz cap is a high precision part that acts as a defensive gasket seal for a quartz boat and a semiconductor furnace tube. Since it is made of high purity quartz it is chemically inert and does not get damaged under thermal shock, which ensures its safety during hyper high temperature wafer processes.
Its shape has been so designed that gas leaks and contamination are minimized and clean furnace atmospheres are preserved. The quartz cap's smooth shape and dimensional accuracy ensure ease of usage, quartz cap ensures consistent performance of the furnace. The three main processes where this quartz is used are diffusion, oxidation, and annealing. The cap serves a vital function in process destabilization and provides shielding to sensitive semiconductor manufacturing devices.
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