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Quartz Boat

product details

The 6 inch wafer carrier quartz boat is a precision-engineered component designed to hold securely and transport 6-inch silicon wafers during high-temperature semiconductor processing. Made from high-purity fused quartz, this boat offers exceptional thermal stability, chemical resistance, and dimensional accuracy, ensuring contamination-free processing in demanding cleanroom environments.

Its robust design allows uniform wafer spacing and excellent compatibility with diffusion, oxidation, LPCVD, and other furnace-based processes. Each quartz boat is manufactured to tight tolerances, with smooth surfaces that minimize particle generation and ensure safe wafer handling. Ideal for use in semiconductor fabs and research facilities, the 6 inch quartz wafer carrier is a critical solution for maintaining wafer integrity throughout thermal processes.

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  • No.5177 Qianghua West Road, Dongqian Street, Nanxun District, Huzhou City, Zhejiang Province

  • +86-572-3032373

    +86-572-3033016

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After 32 years of development and accumulation of technology.

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